Three-dimensional finite element analysis was performed using commercial software Abaqus to study the deformation and strain in the serpentine wire under stretching. Solid elements (Abaqus element type C3D8R) were used for the 300-μm-thick PDMS, and shell elements were used for the serpentine-shaped PI/metal/PI layers. The maximum strain in the metal layer is well below tensile limit, 1% under 15% stretch of the optofluidic probe.

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